Tunability of Piezoelectric MEMS Ring Resonator Based Filter
نویسندگان
چکیده
منابع مشابه
Tunability of Piezoelectric MEMS Ring Resonator Based Filter
The influence of piezoelectric actuator design on a two-port piezoelectrically transduced micro-electro-mechanical (MEMS) ring resonator frequency tuning performance has been investigated. A cubic silicon carbide (3C-SiC) ring resonator was fabricated with a lead–zirconium–titanate (PZT) piezoelectric actuator and sensor integrated on the surface of the ring. Measurements of the transmission fr...
متن کاملOpto-acoustical filter based on phoxonic crystal ring resonator
In this paper, a phoxonic crystal structure is designed that shows a complete phononic and photonic ban gap and is capable to guide the optical waves with transverse magnetic polarization and acoustic waves. The materials used in the structure are nylon and molybdenum, which have suitable refractive index and elastic constant. Also, it is worth of noting that the filling factor is 28% for the p...
متن کاملPlasmonic Adder/Subtractor Module Based on a Ring Resonator Filter
A four port network adder-subtractor module, for surface plasmon polariton (SPP) waves based on a ring resonator filter is proposed. The functionality of module is achieved by the phase difference manipulation of guided SPPs through different arms connected to the ring resonator. The module is designed using the concepts of a basic two-port device proposed in this paper. It is shown that two po...
متن کاملDesign of Piezoelectric Aluminum Nitride MEMS Resonator
The following work reports the design, numerical, analytical and simulation characterization of an Aluminum Nitride MEMS resonator. The paper offers a comparison of rectangular plate MEMS resonator (length extensional and width extensional mode shapes) and ring shape MEMS resonator. It also demonstrates the contour Eigen modes of resonators and their equivalent electric circuit model (BVD). Fur...
متن کاملDesign of a new narrow band channel drop filter based on photonic crystal ring resonator
In this design an optical ring resonator are embedded between two Horizontal input and output waveguides which has 4 orbitals around the center of the resonator so that each orbital consists of 8 rods with different size in which radius of larger orbitals rods are bigger than radius of smaller orbitals rods. The analysis of simulation results showed the proposed filter has the transmission effi...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Procedia Engineering
سال: 2016
ISSN: 1877-7058
DOI: 10.1016/j.proeng.2016.11.450